Fabrication of 3D proximity coupled Josephson junction arrays

✍ Scribed by S.T. Herbert; L.B. Gómez; D.B. Mast; R.S. Newrock; C. Wilks; C.M. Falco

• Publisher: Elsevier Science
• Year: 1995
• Tongue: English
• Weight: 351 KB
• Volume: 18
• Category: Article
• ISSN: 0749-6036
• DOI: 10.1006/spmi.1995.1087

✦ Synopsis

Experimentally realizable 3D arrays of Josephson junctions have been a goal of researchers since 2D Josephson junctions ( (\mathbf{J}) ) arrays were first introduced. In the past, it has proven to be technically impossible to manufacture 3D proximity-coupled arrays. Recent advancements in etching technology have now made fabrication more feasible. In this paper, we present details of our fabrication process.