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On the two-dimensional capacitance calculation of multiconductor multilayered interconnects

✍ Scribed by H. Ymeri; B. Nauwelaers; K. Maex

Book ID
105684264
Publisher
Springer-Verlag
Year
2001
Tongue
English
Weight
990 KB
Volume
56
Category
Article
ISSN
0003-4347

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## Abstract In this paper, a method for computing the capacitance and conductance matrices of multiconductor IC interconnects in a multilayered dielectric region is presented. The number of conductors and the number of dielectric layers are arbitrary. The conductors are very thick (as usual for on‐