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On the investigation of d.c. plasmatron discharges by optical emission spectrometry

✍ Scribed by S. Schiller; U. Heisig; K. Steinfelder; J. Strümpfel; R. Voigt; R. Fendler; G. Teschner


Publisher
Elsevier Science
Year
1982
Tongue
English
Weight
319 KB
Volume
96
Category
Article
ISSN
0040-6090

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For applications at temperatures above 500°C, Ti-6wt.%AI-4wt.%V was protected by sputtering chromium and chromium nitride layers from the embrittlement caused by oxidation. The coating processes were analysed in situ by means of optical emission spectrometry, whereby the deposition rate and the stab