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On the influence of the substrate properties on the internal growth stress of titanium films at 250 °C

✍ Scribed by H.J. Schneeweiß; R. Abermann

Book ID
103430423
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
371 KB
Volume
228
Category
Article
ISSN
0040-6090

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Impedance measurements and photocurrent spectroscopy have been used to examine the dependence on growth rate of the solid state properties of thin ( -c 20 nm) anodic oxide films on titanium. At room temperature, the relative permittivity and defect concentration profiles in the oxide were found to d