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On the induced microstructure changes of the amorphous carbon nitride films during annealing

โœ Scribed by Lejeune, M.; Durand-Drouhin, O.; Charvet, S.; Zeinert, A.; Benlahsen, M.


Book ID
120036523
Publisher
American Institute of Physics
Year
2007
Tongue
English
Weight
820 KB
Volume
101
Category
Article
ISSN
0021-8979

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