On the impact of interfacial SiOx-layer on the passivation properties of PECVD synthesized aluminum oxide

✍ Scribed by Abdelazize Laades; Hans-Peter Sperlich; Mario Bähr; Uta Stürzebecher; Carlos A. Diaz Alvarez; Markus Burkhardt; Heike Angermann; Michael Blech; Alexander Lawerenz

• Book ID: 115561650
• Publisher: John Wiley and Sons
• Year: 2012
• Tongue: English
• Weight: 287 KB
• Volume: 9
• Category: Article
• ISSN: 1862-6351
• DOI: 10.1002/pssc.201200244