On the homogeneity of sputter-deposited ITO films Part II. Etching behaviour

✍ Scribed by J.E.A.M. van den Meerakker; P.C. Baarslag; W. Walrave; T.J. Vink; J.L.C. Daams

• Publisher: Elsevier Science
• Year: 1995
• Tongue: English
• Weight: 451 KB
• Volume: 266
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(95)06742-6