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On the formation of silicon oxynitride by ion implantation in fused silica

✍ Scribed by A Carnera; P Mazzoldi; A Boscolo-Boscoletto; F Caccavale; R Bertoncello; G Granozzi; I Spagnol; G Battaglin

Book ID: 115987623
Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 658 KB
Volume: 125
Category: Article
ISSN: 0022-3093
DOI: 10.1016/0022-3093(90)90861-f

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