Electrical Activity of NitrogenβOxygen C
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Xiaodong Pi; Deren Yang; Xiangyang Ma; Qiong Shui; Duanlin Que
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Article
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2000
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John Wiley and Sons
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English
β 82 KB
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The electrical activity of nitrogenΒ±oxygen (NΒ±O) complexes in nitrogen-doped Czochralski (NCZ) silicon treated by hydrogen plasma was investigated. It was observed that in the hydrogenated NCZ samples the absorption line intensity of m-NΒ±O (NΒ±O complexes inducing middle infrared absorption lines) de