Correlation between mechanical, optical
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V. Cech; J. Studynka; B. Cechalova; J. Mistrik; J. Zemek
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Article
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2008
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Elsevier Science
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English
β 213 KB
Plasma-polymerized films of vinyltriethoxysilane were prepared by plasma-enhanced chemical vapor deposition using an RF (13.56 MHz) helical coupling plasma system operated in a pulsed regime. Thin films deposited under the same deposition conditions but with different thicknesses (9.5 nm-10.5 Β΅m) we