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On picostructural models of physically vapor-deposited films of titanium nitride

✍ Scribed by V. Valvoda; A.J. Perry; L. Hultman; J. Musil; S. Kadlec


Book ID
107930122
Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
667 KB
Volume
49
Category
Article
ISSN
0257-8972

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