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On-chip decoupling zone for package-stress reduction

✍ Scribed by Vincent L. Spiering; Siebe Bouwstra; Ruud M.E.J. Spiering


Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
771 KB
Volume
39
Category
Article
ISSN
0924-4247

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📜 SIMILAR VOLUMES


Realization of mechanical decoupling zon
✍ V.L. Spiering; S. Bouwstra; J.H.J. Fluitman 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 948 KB

The reahzatlon of mechamcal decouphng zones around a membrane to reduce package stresses 1s presented Wet-isotropic etchmg v&h a mtnc/fluondlc solution (HNO,/HF/H,O) as well as restive-Ion etchmg (RIE) wth a sulphurhexafluonde/oxygen (SF,/O,) plasma are mvestlgated to reahze deep nrcular grooves The

Numerical analysis on thermal characteri
✍ Ping Yang; Wei Li 📂 Article 📅 2009 🏛 John Wiley and Sons 🌐 English ⚖ 579 KB

## Abstract The objective of this paper is to investigate stress and strain of a special scale package‐substrate on chip for reliability evaluation or manufacture strategy in deep‐seated situation. A two‐dimensional model with one‐half of cross‐section (2D model) and a three‐dimensional model with