The reahzatlon of mechamcal decouphng zones around a membrane to reduce package stresses 1s presented Wet-isotropic etchmg v&h a mtnc/fluondlc solution (HNO,/HF/H,O) as well as restive-Ion etchmg (RIE) wth a sulphurhexafluonde/oxygen (SF,/O,) plasma are mvestlgated to reahze deep nrcular grooves The
✦ LIBER ✦
On-chip decoupling zone for package-stress reduction
✍ Scribed by Vincent L. Spiering; Siebe Bouwstra; Ruud M.E.J. Spiering
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 771 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0924-4247
No coin nor oath required. For personal study only.
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