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On-axis single-target sputter deposition of YBCO on Si and YSZ

✍ Scribed by C.-Y. Hung; J.M. Van Scyoc; T.E. Schlesingera; J.C. Johnson; J.A. Brewer; M. Migliuolo


Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
519 KB
Volume
33
Category
Article
ISSN
0921-5107

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Sputter deposition of epitaxial Y1Ba2Cu3
✍ O. Gieres; H. Schmidt; K. Hradil; W. HΓΆsler; R. SeebΓΆck πŸ“‚ Article πŸ“… 1991 πŸ› Elsevier Science 🌐 English βš– 260 KB

Thin films of Y1Ba2Cu30~have been prepared by sputter deposition. The sputter parameters like gas pressure, gas mixture, distance target-substrate and deposition temperature h.ave been varied in oroer to find optimum contritions tor, epitaxi~l film growth. Witl~ optimum conditions Te > 90 K and crit