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On anomalous temporal evolution of gas pressure in inductively coupled plasma

โœ Scribed by Seo, B. H.; You, S. J.; Kim, J. H.; Seong, D. J.; Chang, H. Y.


Book ID
120089536
Publisher
American Institute of Physics
Year
2013
Tongue
English
Weight
952 KB
Volume
102
Category
Article
ISSN
0003-6951

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