Neutral gas density depletion due to neutral gas heating and pressure balance in an inductively coupled plasma

✍ Scribed by Shimada, Masashi; Tynan, George R; Cattolica, Robert

• Book ID: 121877065
• Publisher: Institute of Physics
• Year: 2006
• Tongue: English
• Weight: 261 KB
• Volume: 16
• Category: Article
• ISSN: 0963-0252
• DOI: 10.1088/0963-0252/16/1/024