Observation of radio frequency ring-shaped hollow cathode discharge plasma with MgO and Al electrodes for plasma processing

✍ Scribed by Ohtsu, Yasunori; Matsumoto, Naoki

• Book ID: 121737141
• Publisher: AVS (American Vacuum Society)
• Year: 2014
• Tongue: English
• Weight: 710 KB
• Volume: 32
• Category: Article
• ISSN: 0734-2101
• DOI: 10.1116/1.4871467