✦ LIBER ✦
Production of High-Density Radio-Frequency Plasma Source by Ring-Shaped Hollow-Cathode Discharge at Various Trench Shapes
✍ Scribed by Ohtsu, Yasunori; Yahata, Yoshiki; Kagami, Johji; Kawashimo, Yasushi; Takeuchi, Tatsuya
- Book ID
- 118160414
- Publisher
- IEEE
- Year
- 2013
- Tongue
- English
- Weight
- 209 KB
- Volume
- 41
- Category
- Article
- ISSN
- 0093-3813
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