Criteria of radio-frequency ring-shaped hollow cathode discharge using H2 and Ar gases for plasma processing

✍ Scribed by Ohtsu, Yasunori; Kawasaki, Yujiro

• Book ID: 119957619
• Publisher: American Institute of Physics
• Year: 2013
• Tongue: English
• Weight: 709 KB
• Volume: 113
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.4776220