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Observation of high interface state densities at the silicon/oxide interface for low doped polysilicon/oxide/silicon capacitor structures

✍ Scribed by C Leveugle; P.K Hurley; A Mathewson; S Moran; E Sheehan; A Kalnitsky

Book ID: 108362285
Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 188 KB
Volume: 38
Category: Article
ISSN: 0026-2714
DOI: 10.1016/s0026-2714(97)84496-4

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