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Electroactive Centers at the Outer Interface of an Ultrathin Oxide Layer and Their Effect on the Electrical Performance of Single-Crystal Silicon/Noncrystalline Oxide/Polysilicon Structures

✍ Scribed by V. Ya. Uritskii; A. P. Krylov; A. A. Bushlyakov


Book ID
111565668
Publisher
Springer
Year
2000
Tongue
English
Weight
46 KB
Volume
29
Category
Article
ISSN
1063-7397

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