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Observation of defects evolution in strained SiGe layers during strain relaxation

โœ Scribed by J.H. Jang; M.S. Phen; K. Siebein; K.S. Jones; V. Craciun


Book ID
113792497
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
560 KB
Volume
63
Category
Article
ISSN
0167-577X

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