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Observation of a surface peak in low energy implant depth profiles in silicon

✍ Scribed by K. Snowdon; J. Onsgaard; S. Tougaard

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Depth profiles of metal ions implanted i

✍ A. L. Stepanov; V. A. Zhikharev; I. B. Khaibullin 📂 Article 📅 2001 🏛 SP MAIK Nauka/Interperiodica 🌐 English ⚖ 359 KB

Depth profiles of cluster-ion-implanted

✍ Jenq-Horng Liang; Shiaw-Lung Chiang; Chin-Tsai Chen; Huan Niu; Mao-Sheng Tseng 📂 Article 📅 2002 🏛 Elsevier Science 🌐 English ⚖ 164 KB

Depth profiling in the near surface regi

✍ olker Rössiger 📂 Article 📅 1982 🏛 Elsevier Science ⚖ 394 KB

Analysis of depth profiles of implanted

✍ J.H. Liang 📂 Article 📅 1998 🏛 Springer 🌐 English ⚖ 226 KB

Depth profiling of shallow arsenic impla

✍ J. B. Clegg 📂 Article 📅 1987 🏛 John Wiley and Sons 🌐 English ⚖ 585 KB

Range evaluation in SIMS depth profiles

✍ K. Mayerhofer; H. Foisner; K. Piplits; G. Hobler; L. Palmetshofer; H. Hutter 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 259 KB