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Numerical Study on the Effects of Equi-biaxial Residual Stress on Mechanical Properties of Nickel Film by Means of Nanoindentation

✍ Scribed by Lizeng Ling; Shiguo Long; Zengsheng Ma; Xu Liang

Book ID
117695068
Publisher
Allerton Press Inc
Year
2010
Tongue
English
Weight
469 KB
Volume
26
Category
Article
ISSN
1005-0302

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Effects of the substrate on the determin
Effects of the substrate on the determination of thin film mechanical properties by nanoindentation
✍ Ranjana Saha; William D. Nix πŸ“‚ Article πŸ“… 2002 πŸ› Elsevier Science 🌐 English βš– 511 KB

We examine the effects of the substrate on the determination of mechanical properties of thin films by nanoindentation. The properties of aluminum and tungsten films on the following substrates have been studied: aluminum, glass, silicon and sapphire. By studying both soft films on hard substrates a