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Comment on: “Effects of the substrate on the determination of thin films mechanical properties by nanoindentation” by Saha and Nix [Acta Mater 2002;50:23]

✍ Scribed by Ingomar L Jäger


Book ID
114387064
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
97 KB
Volume
47
Category
Article
ISSN
1359-6462

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Effects of the substrate on the determin
✍ Ranjana Saha; William D. Nix 📂 Article 📅 2002 🏛 Elsevier Science 🌐 English ⚖ 511 KB

We examine the effects of the substrate on the determination of mechanical properties of thin films by nanoindentation. The properties of aluminum and tungsten films on the following substrates have been studied: aluminum, glass, silicon and sapphire. By studying both soft films on hard substrates a