✦ LIBER ✦

Numerical investigation of plasma recovery in plasma source ion implantation

✍ Scribed by Kyoung-Jae Chung; Jae-Myung Choe; Gon-Ho Kim; Y.S. Hwang

Book ID: 118501858
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 632 KB
Volume: 521
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2011.11.086

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