Numerical and Experimental Study of Residual Stress of Multilayer Diamond-Like Carbon Films Prepared by Filtered Cathodic Vacuum Arc Deposition

✍ Scribed by Xu, Zh. Y.; Zheng, Y. J.; Sun, H.; Leng, Yong-xiang; Huang, N.

• Book ID: 118055410
• Publisher: IEEE
• Year: 2012
• Tongue: English
• Weight: 656 KB
• Volume: 40
• Category: Article
• ISSN: 0093-3813
• DOI: 10.1109/tps.2012.2204068