✦ LIBER ✦

NRA and XPS characterizations of layers formed by rapid thermal nitridation of thin SiO2 films

✍ Scribed by J-J. Ganem; S. Rigo; I. Trimaille; G-N. Lu; G. Dufour; H. Roulet

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Rapid thermal nitridation of thin SiO2fi

✍ D. Henscheid; M. N. Kozicki; G. W. Sheets; M. Mughal; I. Zwiebel; R. J. Graham 📂 Article 📅 1989 🏛 Springer US 🌐 English ⚖ 763 KB

Deuteron beam analysis of rapid thermal

✍ J-J. Ganem; S. Rigo; I. Trimaille; G-N. Lu; P. Molle 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 498 KB

Nitridation of TiSi2 thin films by rapid

✍ J. Pérez-Rigueiro; C. Jimenez; L. Vázquez; R. Pérez-Casero; J.M. Martínez-Duart 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 515 KB

High and low thermal nitridation of SiO2

✍ B. Balland; J.C. Bureau; A. Benamar; A. Ronda; A. Glachant 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 450 KB

Electrical properties of thin SiO2 films

✍ M. Severi; G. Mattei; L. Dori; P. Maccagnani; G.L. Baldini; G. Pizzochero 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 240 KB

High-temperature thermal nitridation and

✍ Balland, B. ;Glachant, A. ;Ronda, A. ;Dupuy, J. C. 📂 Article 📅 1987 🏛 John Wiley and Sons 🌐 English ⚖ 730 KB