✦ LIBER ✦

High and low thermal nitridation of SiO2 thin films

✍ Scribed by B. Balland; J.C. Bureau; A. Benamar; A. Ronda; A. Glachant

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

High-temperature thermal nitridation and

✍ Balland, B. ;Glachant, A. ;Ronda, A. ;Dupuy, J. C. 📂 Article 📅 1987 🏛 John Wiley and Sons 🌐 English ⚖ 730 KB

Rapid thermal nitridation of thin SiO2fi

✍ D. Henscheid; M. N. Kozicki; G. W. Sheets; M. Mughal; I. Zwiebel; R. J. Graham 📂 Article 📅 1989 🏛 Springer US 🌐 English ⚖ 763 KB

Rapid thermal nitridation of SiO2 films

✍ J.B. Oude Elferink; F.H.P.M. Habraken; W.F. Van Der Weg; E. Dooms; M. Heyns; R. 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 293 KB

Deuteron beam analysis of rapid thermal

✍ J-J. Ganem; S. Rigo; I. Trimaille; G-N. Lu; P. Molle 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 498 KB

Effects of addition of oxygen and water

✍ B. Balland; J.C. Bureau; A. Benamar; J.J. Dubray; A. Glachant 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 296 KB

High field phenomena in thin plasma nitr

✍ M. El-Sayed; J.Camargo Da Costa 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 421 KB