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Novel Titanium Compounds for Metal−Organic Chemical Vapor Deposition of Titanium Dioxide Films with an Ultrahigh Deposition Rate

✍ Scribed by Woo, Kyoungja; Lee, Wan In; Lee, Jong Seung; Kang, Sang Ook

Book ID: 125986011
Publisher: American Chemical Society
Year: 2003
Tongue: English
Weight: 183 KB
Volume: 42
Category: Article
ISSN: 0020-1669
DOI: 10.1021/ic0256967

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