Novel Microtensile Method for Monotonic and Cyclic Testing of Freestanding Copper Thin Films
β Scribed by M.-T. Lin; C.-J. Tong; K.-S. Shiu
- Publisher
- Sage Publications
- Year
- 2009
- Tongue
- English
- Weight
- 494 KB
- Volume
- 50
- Category
- Article
- ISSN
- 0014-4851
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A preparational method was developed solving the problem of cross-sectional TEM preparation of thin films and layer systems deposited onto water-soluble substrates. The technique is based on the replacement of the sample onto steady substrate, followed by mechanical and ion beam thinning. Cross-sect