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Novel engineering coatings produced by closed-field unbalanced magnetron sputtering

โœ Scribed by P.J. Kelly; R.D. Arnell; W. Ahmed; A. Afzal


Publisher
Elsevier Science
Year
1996
Weight
535 KB
Volume
17
Category
Article
ISSN
0261-3069

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Thermal stability and electrochemical pr
โœ YoungSu Kim; GwangSeok Kim; SangYul Lee ๐Ÿ“‚ Article ๐Ÿ“… 2009 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 793 KB

In this work, CrZr-Si-N films with various Si contents from 0 to 23.5 at.% were synthesized by closed field unbalanced magnetron sputtering with vertical magnetron sources. The characteristics such as crystalline structure, surface morphology, and hardness of the films as a function of the Si conten