𝔖 Bobbio Scriptorium

✦ LIBER ✦

Novel Approach of Semiconductor Manufacturing Process on Copper Dual Damascene Processes Integration

✍ Scribed by C.-J. Weng

Book ID: 111201872
Publisher: John Wiley and Sons
Year: 2009
Tongue: English
Weight: 741 KB
Volume: 45
Category: Article
ISSN: 0039-2103
DOI: 10.1111/j.1475-1305.2009.00599.x

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

A novel technique for in-line monitoring

A novel technique for in-line monitoring of micro-contamination and process induced damage : Venkatesan Muraliet al. IEEE Transactions on Semiconductor Manufacturing5(3), 214 (1992)

📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 115 KB

[IEEE 2001 IEEE International Symposium

[IEEE 2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. - San Jose, CA, USA (8-10 Oct. 2001)] 2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203) - A novel pad conditioning disk design of tungsten chemical mechanical polishing process for deep sub-micron device yield improvement

✍ Wang, T.C.; Hsieh, T.E.; Wang, Y.L.; Liu, C.W.; Lo, K.Y.; Wang, J.K.; Lee, W. 📂 Article 📅 2001 🏛 IEEE ⚖ 381 KB

SPIE Proceedings [SPIE SPIE OPTO: Integr

SPIE Proceedings [SPIE SPIE OPTO: Integrated Optoelectronic Devices - San Jose, CA (Saturday 24 January 2009)] Novel In-Plane Semiconductor Lasers VIII - New approaches towards the understanding of the catastrophic optical damage process in in-plane diode lasers

✍ Tomm, Jens W.; Ziegler, Mathias; Talalaev, Vadim; Matthiesen, Clemens; Elsaesser 📂 Article 📅 2009 🏛 SPIE ⚖ 689 KB

[IEEE 2012 IEEE 11th International Confe

[IEEE 2012 IEEE 11th International Conference on Solid-State and Integrated Circuit Technology (ICSICT) - Xian, China (2012.10.29-2012.11.1)] 2012 IEEE 11th International Conference on Solid-State and Integrated Circuit Technology - High performance of large-sized dye sensitized solar cells based on a novel low-cost metal grids manufactured process

✍ Du, Guangwei; Wang, Yan; Lu, Ziqing; Yang, Fei; Wang, Xu; Liu, Lifeng; Han, Dedo 📂 Article 📅 2012 🏛 IEEE ⚖ 550 KB

[IEEE ICSE 2002. IEEE International Conf

[IEEE ICSE 2002. IEEE International Conference on Semiconductor Electronics. - Penang, Malaysia (19-21 Dec. 2002)] ICONIP '02. Proceedings of the 9th International Conference on Neural Information Processing. Computational Intelligence for the E-Age (IEEE Cat. No.02EX575) - A novel low-power high-speed programmable dual modulus divider for PLL-based frequency synthesizer

✍ Sulaiman, M.S.; Khan, N. 📂 Article 📅 2002 🏛 IEEE 🌐 English ⚖ 239 KB