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Nonequilibrium solidification of monocrystalline Si induced by ArF-excimer-laser irradiation

✍ Scribed by R. Čemý; I. Lukes; V. Chab; R. Sasik

Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
612 KB
Volume
218
Category
Article
ISSN
0040-6031

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Lasers are used to modify polymeric materials. In this work, a number of polycarbonate (PC) pieces were exposed by ArF excimer laser, 193 nm, at various UV doses from 10 to 100 J/cm 2 with 50-500 mJ/pulse at 10 Hz pulse repetition rate. Morphology of PC has been investigated by scanning electron mic