✦ LIBER ✦

Nondestructive determination of damage depth profiles in ion-implanted semiconductors by multiple-angle-of-incidence single-wavelength ellipsometry

✍ Scribed by M. Fried; T. Lohner; E. Jároli; C. Hajdu; J. Gyulai

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Determination by Raman scattering of the

✍ R. Arès; Y.B. Trudeau; J.L. Brebner; G.E. Kajrys; M. Jouanne 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 478 KB

Comparative study of ion implantation ca

✍ P. Petrik; T. Lohner; M. Fried; N.Q. Khánh; O. Polgár; J. Gyulai 📂 Article 📅 1999 🏛 Elsevier Science 🌐 English ⚖ 425 KB

Ion implantation-induced damage depth pr

✍ J. Romanek; D. Grambole; F. Herrmann; M. Voelskow; M. Posselt; W. Skorupa; J. Żu 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 326 KB