✦ LIBER ✦
Ion implantation-induced damage depth profile determination in SiC by means of RBS/C and bevelling technique
✍ Scribed by J. Romanek; D. Grambole; F. Herrmann; M. Voelskow; M. Posselt; W. Skorupa; J. Żuk
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 326 KB
- Volume
- 251
- Category
- Article
- ISSN
- 0168-583X
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