## Ž . Ž . Ž . We have grown thin Pb Zr Ti O PZT films on PtrSiO rSi substrates by pulsed laser ablation PLA and x 1yx 3 2 Ž . subsequent rapid thermal annealing RTA . X-ray diffraction analysis showed that the crystallographic orientation of PZT Ž . films after RTA clearly depended on the micros
Non-linear piezoelectric properties of the thin Pb(ZrxTi1−x)O3 (PZT) films deposited on the Si-substrate
✍ Scribed by J. Nosek; M. Sulc; L. Burianova; C. Soyer; E. Cattan; D. Remiens
- Book ID
- 108170006
- Publisher
- Elsevier Science
- Year
- 2005
- Tongue
- English
- Weight
- 250 KB
- Volume
- 25
- Category
- Article
- ISSN
- 0955-2219
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