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Non-equilibrium processes and dust formation in low pressure reactive plasmas

✍ Scribed by Stefanovií, I; Kovačević, E; Berndt, J; Winter, J

Book ID
120303953
Publisher
Institute of Physics
Year
2007
Tongue
English
Weight
739 KB
Volume
71
Category
Article
ISSN
1742-6588

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Formation of dust particles is a common mechanism in low-pressure plasmas. These big particles (in comparison with other plasma species) are sometimes the desired final products of the process, but they may also constitute a severe drawback in certain contexts. In either situation, it is necessary t