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Plasmoid formation and multiple steady states in a low pressure, inductively coupled electronegative plasma

✍ Scribed by Economou, D.J.; Wise, R.S.; Kubota, A.A.


Book ID
114558667
Publisher
IEEE
Year
1999
Tongue
English
Weight
510 KB
Volume
27
Category
Article
ISSN
0093-3813

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