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Nanoparticle formation in low-pressure silane plasmas: bridging the gap between a-Si:H and μc-Si films

✍ Scribed by P Roca i Cabarrocas; S Hamma; S.N Sharma; G Viera; E Bertran; J Costa


Book ID
117148918
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
507 KB
Volume
227-230
Category
Article
ISSN
0022-3093

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