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Non-destructive thickness determination of thin cobalt and cobalt disilicide layers on silicon substrates

✍ Scribed by E Roca; J Vanhellemont; R.J Schreutelkamp; J Vermeiren


Book ID
107864612
Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
419 KB
Volume
240
Category
Article
ISSN
0040-6090

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