1133. Non-destructive determination of film thickness on silicon substrate: Yu I Uryvskiy et al, elektron tekh upr kachest standard, 2, 1970, 123–127 (in Russian).

• Book ID: 103453323
• Publisher: Elsevier Science
• Year: 1971
• Tongue: English
• Weight: 130 KB
• Volume: 21
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(71)92294-9