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Non-destructive, non-contact measurement of interconnect plating thickness


Book ID
123314141
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
745 KB
Volume
107
Category
Article
ISSN
0026-0576

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Non-destructive thickness measurement of
โœ R.P. Shukla; D.V. Udupa; N.C. Das; Murty V. Mantravadi ๐Ÿ“‚ Article ๐Ÿ“… 2006 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 655 KB

A quick estimation of the thickness of thin films deposited on glass plates is described in this paper. The principle of the method is based on the measurement of the Haidinger fringes generated by the film. For ease of observation and measurement, a commercial Fizeau-type interferometer such as a Z