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Non-destructive, non-contact characterization of silicon using photothermal radiometry

✍ Scribed by T.M. Hiller; M.G. Somekh; S.J. Sheard; D.R. Newcombe

Book ID: 103952801
Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 435 KB
Volume: 5
Category: Article
ISSN: 0921-5107
DOI: 10.1016/0921-5107(90)90040-i

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