Non-destructive evaluation of semiconductor using laser SQUID microscope

✍ Scribed by Koichi Kojima; Sachio Suda; Xiangyan Kong; Hideo Itozaki

• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 217 KB
• Volume: 445-448
• Category: Article
• ISSN: 0921-4534
• DOI: 10.1016/j.physc.2006.06.020

✦ Synopsis

A laser SQUID microscope has become a new tool for non-destructive evaluation of semiconductors. To improve the spatial resolution, a flux guide was introduced in the laser SQUID microscope. Using our laser SQUID microscope with and without the flux guide we have measured the magnetic field distribution in polycrystalline silicon solar cells with the same SQUID-sample distance. A laser beam induced current was used to generate the magnetic field. The solar cell was set at room temperature. Using the flux guide produces an image that is better resolved, with spatial resolution of about 50 lm. The experiment has also been carried out with different laser wavelength.