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Non-destructive characterization of thin film SIMOX structures using microscope spectrophotometry

✍ Scribed by Alan J. Criddle; Peter J. Pearson; Karen J. Reeson; Amarjit K. Robinson; Peter L.F. Hemment; Chris D. March; G.Roger Booker

Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 630 KB
Volume: 12
Category: Article
ISSN: 0921-5107
DOI: 10.1016/0921-5107(92)90283-f

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