Non-destructive characterization of III–V alloy multilayer structures using spectroscopic ellipsometry

✍ Scribed by C. Pickering; R.T. Carline; N.S. Garawal; J.L. Stehlé; J.P. Piel; R. Blunt; P. Kirby

• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 378 KB
• Volume: 233
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(93)90083-2