Non-destructive evaluation of semiconduc
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Koichi Kojima; Sachio Suda; Xiangyan Kong; Hideo Itozaki
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Article
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2006
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Elsevier Science
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English
โ 217 KB
A laser SQUID microscope has become a new tool for non-destructive evaluation of semiconductors. To improve the spatial resolution, a flux guide was introduced in the laser SQUID microscope. Using our laser SQUID microscope with and without the flux guide we have measured the magnetic field distribu