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Nitrogen plasma immersion ion implantation into high speed steel

✍ Scribed by S Mändl; E Richter; R Günzel; W Möller

Book ID
114170710
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
246 KB
Volume
148
Category
Article
ISSN
0168-583X

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Plasma immersion ion implantation of nit
Plasma immersion ion implantation of nitrogen into H13 steel under moderate temperatures
✍ M. Ueda; C. Leandro; H. Reuther; C.M. Lepienski 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 125 KB

Ion implantation of nitrogen into samples of tempered and quenched H13 steel was carried out by plasma immersion technique. A glow discharge plasma of nitrogen species was the ion source and the negative high voltage pulser provided 10-12 kV, 60 ls duration and 1.0-2.0 kHz frequency, flat voltage pu