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Nitrogen ion implantation into the amorphous CN films prepared with ion beam assisted deposition

✍ Scribed by X.W. Su; H.W. Song; Q.Y. Zhang; F.Z. Cui


Book ID
113287321
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
585 KB
Volume
111
Category
Article
ISSN
0168-583X

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