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Nitrogen ion beam induced recrystallization of AlNx films

✍ Scribed by Kobayashi Kenzo; Namba Susumu; Fujihana Takanobu; Dai Yisheng; Iwaki Masaya

Book ID: 113279421
Publisher: Elsevier Science
Year: 1988
Tongue: English
Weight: 430 KB
Volume: 33
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(88)90661-1

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